Part of the Auction State-of-the-art production facilities for technical ceramics and PTC heating elements
Sputtering System (SPA001) Aurion Anlagentechnik B-VPA-28AUCTION#19683-48
Details
Product Type
Aurion Anlagentechnik
Type
B-VPA-28
Construction Year
2019
Description
SN: 302343, Net weight approx. 7,000 kg, Max. temp. 25° C, Connected load 100 kVA, mobile gantry crane, Manufacturer: Schilling, lifting capacity 1,000 kg, electric chain hoist, crane crossbeam, dimensions without vacuum pumps 6,217 x 3,500 x 2,100 mm (W x D x H); weight approx. 7,000 kg; chamber volume approx. 670 L; power connection 400/230 V, 50 Hz, approx. 100 kVA, approx. 125 A; Substrate: 38 x 31 x 1.08 mm; transport pallets: 416.9 x 504.5 mm, each holding 144 substrates; substrate heating up to 250 °C; Final pressure < 1×10⁻⁷ hPa; process gas: argon, 2 Bronkhorst F-201CS flow controllers, 500 mln/min each; 2 ADL GX 150/800 DC generators, 15 kW each; Pfeiffer Vacuum vacuum pumps: 4x DUO 35, 2x DUO 65, 2x Okta 500 rotary vane pumps, 3x HiPace 1200 U turbopumps, 1 HiPace 2300 U; VAT valves; Siemens SIMATIC S7 control system with panel PC and WinCC.
Location
- 07629 Hermsdorf, Oststr. 11/ Produktion/ Sputteranlage
Dates
Inspection
Mon, Nov. 16, 2026 - Tue, Nov. 17, 2026
After consulting with Mr. Kircher at: info@netbid.com
Pickup
Mon, Nov. 23, 2026 - Fri, Dec. 4, 2026
After consulting with Mr. Kircher at: info@netbid.com
Auction Terms
Special Terms: Cash payments are not accepted on site!
Parts of this page have been machine translated. The German original text applies.
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